鎺ュ湴闆婚樆娓│鍎�妾㈡脯鏂规硶
闆婚樆娓│鍎�锛屾槸娓噺鐗╅珨灏�(d菐o)闆绘�х殑涓�绋剙鍣紝闆婚樆娓│鍎�琚唬娉涚殑鎳�(y墨ng)鐢ㄤ簬闆绘埃瀹夊叏妾㈡煡鑸囨帴鍦板伐绋嬬宸ラ绛夊牬鍚堛�傞浕闃绘脯瑭﹀剙鐨勭ó椤炴瘮杓冨锛屽寘鎷帴鍦伴浕闃绘脯瑭﹀剙銆佺禃绶ｉ浕闃绘脯瑭﹀剙銆佹帴鍦伴浕闃绘脯瑭﹀剙銆佺洿娴侀浕闃绘脯閲忓剙銆佽〃闈㈤浕闃绘脯瑭﹀剙浠ュ強鍥炶矾闆婚樆娓│
浣跨敤鏂规硶锛�
鎺ュ湴闆婚樆娓│鍎�鏄寚鍩嬪叆鍦颁笅鐨勬帴鍦伴珨闆婚樆鍜屽湡澹ゆ暎娴侀浕闃伙紝閫氬父閲囩敤鍨嬫帴鍦伴浕闃绘脯閲忓剙(鎴栫ū鎺ュ湴闆婚樆鎼栬〃)閫茶娓噺銆傚瀷娓噺鍎�鍏跺褰㈣垏鏅�氱禃绶ｆ悥琛ㄥ樊涓嶅锛屼篃灏辨寜缈掓叄绋辩偤鎺ュ湴闆婚樆鎼栬〃銆傚瀷鎼栬〃鐨勫褰㈢祼(ji茅)妲�(g貌u)闅ㄥ瀷铏熺殑涓嶅悓绋嶆湁璁婂寲锛屼絾浣跨敤鏂规硶鍩烘湰鐩稿悓銆傚瀷鎺ュ湴闆婚樆娓噺鍎�闅ㄨ〃闄勫付鎺ュ湴鎺㈡脯妫掑叐鏀�佸皫(d菐o)绶氫笁鏍广�備娇鐢ㄦ柟娉曞拰娓噺姝ラ濡備笅:
(a)鎺ュ湴闆婚樆娓│鍎�(b)閫ｆ帴绶�(c)娓噺鎺ュ湴妫�
1銆佹媶闁嬫帴鍦板共绶氳垏鎺ュ湴楂旂殑閫ｆ帴榛烇紝鎴栨媶闁嬫帴鍦板共绶氫笂鎵�鏈夋帴鍦版敮绶氱殑閫ｆ帴榛炪��
2銆佸皣鍏╂牴鎺ュ湴妫掑垎鍒ユ彃鍏ュ湴闈�400mm娣憋紝涓�鏍归洟鎺ュ湴楂�40m閬狅紝鍙︿竴鏍归洟鎺ュ湴楂�20m閬犮��
3銆佹妸鎼栬〃缃簬鎺ュ湴楂旇繎鏃佸钩鏁寸殑鍦版柟锛岀劧鍚庨�茶鎺ョ窔銆�
(1)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丒鍜屾帴鍦拌缃殑鎺ュ湴楂擡鈥层��
(2)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丆鍜岄洟鎺ュ湴楂�40m閬犵殑鐨勬帴鍦版C鈥层��
(3)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丳鍜岄洟鎺ュ湴楂�20m閬犵殑鎺ュ湴妫扨鈥层��
4銆佹牴鎿�(j霉)琚脯鎺ュ湴楂旂殑鎺ュ湴闆婚樆瑕佹眰锛岃(di脿o)绡�(ji茅)濂界矖瑾�(di脿o)鏃嬮垥(涓婃湁涓夋獢鍙(di脿o)鑼冨湇)銆�
5銆佷互绱�120杞�(zhu菐n)/鍒嗛悩鐨勯�熷害鍧囧嫽鍦版悥鍕曟悥琛ㄣ�傜暥琛ㄩ嚌鍋忚綁(zhu菐n)鏅傦紝闅ㄥ嵆瑾�(di脿o)绡�(ji茅)寰(di脿o)鎾ョ洡锛岀洿鑷宠〃閲濆眳涓偤姝��備互寰(di脿o)鎾ョ洡瑾�(di脿o)瀹氬悗鐨勮畝鏁�(sh霉)锛屽幓涔樹互绮楄(di脿o)瀹氫綅鍊嶆暩(sh霉)锛屽嵆鏄娓帴鍦伴珨鐨勬帴鍦伴浕闃汇�備緥濡傚井瑾�(di脿o)璁�鏁�(sh霉)鐐�0.6锛岀矖瑾�(di脿o)鐨勯浕闃诲畾浣嶅�嶆暩(sh霉)鏄�10锛屽墖琚脯鐨勬帴鍦伴浕闃绘槸6惟銆�
6銆佺偤浜嗕繚璀夋墍娓帴鍦伴浕闃诲�肩殑鍙潬锛屾噳(y墨ng)鏀硅畩鏂逛綅閲嶆柊閫茶寰�(f霉)娓�傚彇骞炬娓緱鍊肩殑骞冲潎鍊间綔鐐烘帴鍦伴珨鐨勬帴鍦伴浕闃汇��
琛ㄩ潰浠嬬垂
琛ㄩ潰闆婚樆娓│鍎�娓噺闃绘姉婧害鍜屾繒搴︺��"婵曞害鍜屾韩搴︽渻褰遍熆闃绘姉锛屾墍浠ュ繀闋堟脯閲�" 娓噺琛ㄩ潰闃绘姉10 -10 姝愬/鈻★紝娓噺闆婚樆10 -10 姝愬
鎿嶄綔鎵嬪唺
娓噺鍓嶏紝棣栧厛纰轰繚寰呮脯琛ㄩ潰骞插噲鐒℃薄鏌�
琛ㄩ潰闃绘姉
1 銆佸钩琛屾帰闋樆鎶楁脯閲忔硶(Parallel Probe ResistivityMethod)
骞宠鎺㈤牠闃绘姉娓噺娉曟槸绗﹀悎EOS/ESD-S11.11-1993妯欐簴鐨勬脯閲忔柟娉曪紝閫欐槸涓�绋揩閫熺殑娓噺骞抽潰鍧囧嫽鏉愭枡闆婚樆鍊肩殑鏂规硶銆傞�欑ó鏂规硶涔熼仼鍚堜簬澶氬堡鏉愭枡鐨勬脯閲忥紝浣嗘槸鍦ㄩ樆鎶楀�煎牨鍛婁腑蹇呴爤娉ㄦ槑娓噺鏅傜殑婧害鍜屾繒搴︽浠躲�� A 銆佸皣琛ㄦ斁鍦ㄥ緟娓噺鐨勭墿楂旇〃闈���
B銆佸皣闁嬮棞(gu膩n)瑾�(di脿o)鍒版墍闇�鐨勯浕澹撲綅缃�(10浼忔垨100浼�)
C銆佷互澶х磩5纾呯殑澹撳姏鎸佺簩(x霉)鎸変笅娓噺鎸夐垥锛屾鏅侺CD灞忔渻椤ず鍑烘脯閲忕殑琛ㄩ潰闃绘姉锛屾韩搴﹀拰鐩稿皪婵曞害鍊硷紝鏁村�嬫脯閲忛亷绋嬪ぇ绱勭偤鍗佷簲绉掔ó銆�
路琛ㄩ潰闃绘姉鍠綅鐐烘瓙濮�/鈻�
路婧害鍠綅鐐烘敐寮�
路鐩稿皪婵曞害鍠綅鐐虹櫨鍒嗘瘮
鍦ㄦ瘡娆℃脯閲忎腑锛屾寜涓嬫脯閲忔寜閳曞悗锛屾脯瑭﹀剙灏囬�ｇ簩(x霉)椤ず淇暣娓噺鍊硷紝鏉鹃枊鎸夐垥鍚庣磩鍥涘崄浜旂鍏�(n猫i)锛岄’绀虹殑鏄渶鍚庝竴鍊嬫脯閲忓�笺��
2 銆佸悓蹇冪挵(hu谩n)鎺㈤牠闃绘姉娓噺娉�(Concentric Ring Probe Resistivitymethod)(鍚屽績鐠�(hu谩n)鎺㈤牠鐐洪伕璩间欢)
灏囬�ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁�� 3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍚屽績鐠�(hu谩n)鎺㈤牠 (閬歌臣浠�)鐩歌伅(li谩n)銆傚皣鎺㈤牠鏀惧湪寰呮脯瑭︾墿楂旇〃闈㈠悗锛屾寜涓嬫寜閳曠磩15绉掗悩鍚庯紝鍦ㄦ恫鏅堕’绀哄睆涓婂皣椤ず鍑烘纰虹殑婧害鍜岀浉灏嶆繒搴︼紝姝ｇ⒑鐨勮〃闈㈤樆鎶楀�肩偤娑叉櫠椤ず灞忎笂鐨勮畝鏁�(sh霉)涔樹互 10锛屽柈浣嶇偤姝愬/鈻°�� 渚嬪:
鏅跺睆涓婇’绀虹偤3.5脳10 4 姝愬/鈻�;瀵﹂殯闃绘姉鍊肩偤3.5脳10 5 姝愬/鈻°��
浜屻�佽〃闈㈤浕闃绘脯閲�(榛炲皪榛�) (Surface ResistanceMeasurement (RTT))
閫欏�嬫脯閲忔柟娉曟槸绗﹀悎EOS/ESD-S4.1娓噺瑕佹眰渚嗘脯閲忕崹绔嬩簬鎺ュ湴鐨勫叐榛炰箣闁撶殑闆婚樆锛岀敤閫欏�嬫脯閲忔柟娉曞緱鍑虹殑娓噺绲�(ji茅)鏋滆垏琚脯鐗╅珨鐨勮檿鐞嗐�佸叐鍊�5纾呮帰闋箣闁撶殑璺濋洟绛夊洜绱犳湁闂�(gu膩n)锛屽洜姝わ紝鎳�(y墨ng)閬告搰姝ｇ⒑鐨勬脯閲忚(gu墨)绋嬶紝姣忔鍦ㄥ悓妯ｈ姹傜殑娓噺姊濅欢涓嬮�茶娓│銆� A 銆佸皣閫ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁��3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍏╁��5纾呴噸鎺㈤牠鐩歌伅(li谩n)銆�
B銆佹寜鐓ф脯閲忚(gu墨)绋嬪皣鍏╁�嬫帰闋斁缃湪寰呮脯鐗╅珨琛ㄩ潰銆�
C銆侀伕鎿囨墍闇�鐨勯浕澹撳��(10浼忔垨100浼�)
D銆佹寜涓嬮枊闂�(gu膩n)鐩村埌椤ず鍑烘墍閬哥殑闆诲鍊�(10浼忔垨100浼�)锛岀辜绾�(x霉)鎸夎憲闁嬮棞(gu膩n)鐩磋嚦鎵�娓浕闃�(鍠綅鐐烘瓙 濮�)锛岀浉灏嶆繒搴﹀拰婧害椤ず鍦ㄦ恫鏅堕’绀哄睆涓娿��
闆婚樆娓噺
閫欏�嬫脯閲忔柟娉曟槸鐢ㄤ簬娓噺鐗╅珨琛ㄩ潰涓�榛炶垏琛ㄩ潰涓婂彟涓�鎺ュ湴榛炰箣闁撶殑琛ㄩ潰闆婚樆锛屾脯閲忔柟娉曠鍚圗OS/ESD S4.1娓噺妯欐簴銆�
A 銆佸皣鍏╂閫ｇ窔鐨勪竴绔垎鍒ユ彃鍏ヨ〃鐨勫叐鍊�3.5姣背鎻掑瓟锛岀劧鍚庡皣鍏朵腑涓�姊濇帴楸烽瓪澶撅紝鍙﹀涓�姊濊垏涓�鍊�5纾呴噸鐩ゅ舰鎺㈤牠鐩歌伅(li谩n)銆�
B銆佸皣楸烽瓪澶惧瓙鎺ュ埌鎵�鐭ョ殑鎺ュ湴榛炰笂锛屾寜鐓ф脯閲忚姹傚皣鐩ゅ舰鎺㈤牠鏀惧湪寰呮脯鐗╅珨琛ㄩ潰涓娿��
C銆佹寜涓嬫脯閲忔寜閳曠洿鑷抽浕闃�(鍠綅鐐烘瓙濮�)銆佺浉灏嶆繒搴︺�佹韩搴﹀�奸’绀哄湪椤ず灞忎笂锛屾脯閲忕祼(ji茅)鏋滅鍚圗IA锛孍OS/ESD锛孉NSI锛� IEC-93,CECC,ASTM娓噺妯欐簴锛屽皪浜庨珮闃绘姉鏉愭枡鐨勬脯閲忔檪鐐轰繚璀夋脯寰楅珮绮惧害娓噺绲�(ji茅)鏋滐紝闇�娉ㄦ剰涓嶈浣垮叐寮曠窔浜ょ枈锛屼笉瑕佺敤鎵嬫帴瑙告帰闋紝寮曠窔鍜岃娓墿楂斻��
鏍℃簴姝ラ锛�
1 銆佽寖鍦嶇偤10 3 鍒�10 12 鍏锋湁绮惧害1%鐨勯樆鎶楅浕姗嬨�傞珮绮惧害鐩稿皪婵曞害琛�(Relative Humidity Hygrometer)楂樼簿搴︽韩搴﹁〃(High accuracy Thermometer)
2銆佹墦闁嬭〃钃嬶紝灏忓績鍒囪帿鎼嶅偡闆昏矾鏉夸笂鍏╂閫ｆ帴闆绘簮闁嬮棞(gu膩n)鐨勫皫(d菐o)绶氥��
3銆佹壘鍒伴浕璺澘鍙充笅鏂逛笁鍊嬫牎姝ｈ(di脿o)绡�(ji茅)鍣�(Calibration Pots)
4銆佷娇琛ㄥ湪閫欎竴鐠�(hu谩n)澧冩浠朵笅璧风⒓1/2灏忔檪锛屽彇寰楄嚜骞宠 鍚庢墠鍙枊濮嬫脯瑭︺��
5銆侀噰鐢ㄦ脯瑭﹀剙鑷付鐨勯�ｆ帴绶氫竴绔�ｆ帴涓婇狈榄氬ぞ锛屽彟涓�绔钑夋彃闋��
6銆佸皣3.5姣背闀风殑鎻掗牠鎻掑叆琛ㄧ殑鎻掑彛銆�
7銆佺敤楸烽瓪澶鹃�ｆ帴闆婚樆鍣ㄥ叐绔��
8銆佷笁鍊嬫牎姝ｈ(di脿o)绡�(ji茅)鍣紝鏈�涓婇潰鐨勭偤"婵曞害"娓噺锛屼腑闁撶殑鐐�"闃绘姉"锛屾渶涓嬮潰鐨勭偤"婧害鐢ㄥ皬铏熻灪绲插垁瑾�(di脿o)绡�(ji茅)"銆傞爢鏅傞嚌鏂瑰悜鐐哄鍔犲�艰(di脿o)绡�(ji茅)锛岄�嗘檪閲濇柟鍚戠偤闄嶄綆鍊艰(di脿o)绡�(ji茅)銆�
9銆佹寜涓嬮浕婧愰枊闂�(gu膩n)锛屽悓鏅傛瘮杓�"婧害"锛�"婵曞害"鍜�"闆婚樆"鍊笺��
10銆侀噵鏀鹃浕婧愰枊闂�(gu膩n)锛屽苟鎱㈡參瑾�(di脿o)绡�(ji茅)鐩告噳(y墨ng)鐨勬牎姝ｈ(di脿o)绡�(ji茅)鍣ㄣ��
11銆佸啀娆℃寜涓嬮浕婧愰枊闂�(gu膩n)锛岃瀵烲CD椤ず灞忋��
12銆佸闇�瑕佸啀鏍℃簴锛屽彲鍐嶆寜涓嬮浕婧愰枊闂�(gu膩n)鍜岃(di脿o)绡�(ji茅)鏍℃鍣ㄣ��
13銆佽搵涓婅〃钃嬪苟灏囧洓鍊嬪浐瀹氳灪绲蹭笂绶娿��
14銆佹寜涓嬮浕婧愰枊闂�(gu膩n)纰哄畾琛ㄦ槸鍚﹀伐浣滄甯搞��
闆婚樆娓│鍎�浣跨敤鏂规硶锛�
1)鐔熻畝鎺ュ湴闆婚樆娓噺鍎�鐨勪娇鐢ㄨ鏄庢浉锛屾噳(y墨ng)鍏ㄩ潰浜嗚В鍎�鍣ㄧ殑绲�(ji茅)妲�(g貌u)銆佹�ц兘鍙婁娇鐢ㄦ柟娉曘��
2)鍌欓綂娓噺鏅傛墍蹇呴爤鐨勫伐鍏峰強鍏ㄩ儴鍎�鍣ㄩ檮浠讹紝骞跺皣鍎�鍣ㄥ拰鎺ュ湴鎺㈤嚌鎿︽嫮骞插噲锛岀壒鍒ユ槸鎺ュ湴鎺㈤嚌锛屼竴瀹氳灏囧叾琛ㄩ潰褰遍熆灏�(d菐o)闆昏兘鍔涚殑姹″灑鍙婇姽婕竻鐞嗗共鍑堛��
3)灏囨帴鍦板共绶氳垏鎺ュ湴楂旂殑閫ｆ帴榛炴垨鎺ュ湴骞茬窔涓婃墍鏈夋帴鍦版敮绶氱殑閫ｆ帴榛炴柗闁嬶紝浣挎帴鍦伴珨鑴洟浠讳綍閫ｆ帴闂�(gu膩n)绯绘垚鐐虹崹绔嬮珨銆�
1)灏囧叐鍊嬫帴鍦版帰閲濇部鎺ュ湴楂旇蓟灏勬柟鍚戝垎鍒ユ彃鍏ヨ窛鎺ュ湴楂�20m銆�40m鐨勫湴涓嬶紝鎻掍汉娣卞害鐐�400mm锛屽涓嬪湒鎵�绀恒��
鎺ュ湴闆婚樆娓│浣跨敤鍦栬В:
a)瀵﹂殯鎿嶄綔
b)绛夋晥鍘熺悊
2)灏囨帴鍦伴浕闃绘脯閲忓剙骞虫斁浜庢帴鍦伴珨闄勮繎锛屽苟閫茶鎺ョ窔锛屾帴绶氭柟娉曞涓�:
鈶犵敤鏈�鐭殑灏堢敤灏�(d菐o)绶氬皣鎺ュ湴楂旇垏鎺ュ湴娓噺鍎�鐨勬帴绶氱"E1"(涓夌閳曠殑娓噺鍎�)鎴栬垏C2銆�"鐭帴鍚庣殑鍏叡绔�(鍥涚閳曠殑娓噺鍎�)鐩搁�ｃ��
鈶＄敤鏈�闀风殑灏堢敤灏�(d菐o)绶氬皣璺濇帴鍦伴珨40m鐨勬脯閲忔帰閲�(闆绘祦鎺㈤嚌)鑸囨脯閲忓剙鐨勬帴绶氶垥"C1"鐩搁�ｃ��
鈶㈢敤浣欎笅鐨勯暦搴﹀眳涓殑灏堢敤灏�(d菐o)绶氬皣璺濇帴鍦伴珨鈷沵鐨勬脯閲忔帰閲�(闆讳綅鎺㈤嚌)鑸囨脯閲忓剙鐨勬帴绶氱"P1"鐩搁�ｃ��
3)灏囨脯閲忓剙姘村钩鏀剧疆鍚庯紝妾㈡煡妾㈡祦瑷堢殑鎸囬嚌鏄惁鎸囧悜涓績绶氾紝鍚﹀墖瑾�(di脿o)绡�(ji茅)"闆朵綅瑾�(di脿o)鏁村櫒"浣挎脯閲忓剙鎸囬嚌鎸囧悜涓績绶氥��
4)灏�"鍊嶇巼妯欏害"(鎴栫ū绮楄(di脿o)鏃嬮垥)缃簬鏈�澶у�嶆暩(sh霉)锛屽苟鎱㈡參鍦拌綁(zhu菐n)鍕曠櫦(f膩)闆绘杞�(zhu菐n)鏌�(鎸囬嚌闁嬪鍋忕Щ)锛屽悓鏅傛棆鍕�"娓噺妯欏害鐩�"(鎴栫ū绱拌(di脿o)鏃嬮垥)浣挎娴佽▓鎸囬嚌鎸囧悜涓績绶氥��
5)鐣舵娴佽▓鐨勬寚閲濇帴杩戜簬骞宠 鏅�(鎸囬嚌杩戜簬涓績绶�)鍔犲揩鎼栧嫊杞�(zhu菐n)鏌勶紝浣垮叾杞�(zhu菐n)閫熼仈鍒�120r/min浠ヤ笂锛屽悓鏅傝(di脿o)鏁�"娓噺妯欏害鐩�"锛屼娇鎸囬嚌鎸囧悜涓績绶氥��
6)鑻�"娓噺妯欏害鐩�"鐨勮畝鏁�(sh霉)閬庡皬(灏忎簬1)涓嶆槗璁�婧栫⒑鏅傦紝瑾槑鍊嶇巼妯欏害鍊嶆暩(sh霉)閬庡ぇ銆傛鏅傛噳(y墨ng)灏�"鍊嶇巼妯欏害"缃簬杓冨皬鐨勫�嶆暩(sh霉)锛岄噸鏂拌(di脿o)鏁�"娓噺妯欏害鐩�"浣挎寚閲濇寚鍚戜腑蹇冪窔涓婂苟璁�鍑烘簴纰鸿畝鏁�(sh霉)銆�
7)瑷堢畻娓噺绲�(ji茅)鏋滐紝鍗砇鍦�="鍊嶇巼妯欏害"璁�鏁�(sh霉)脳"娓噺妯欏害鐩�"璁�鏁�(sh霉)銆�
鍦伴浕闃绘脯瑭﹀剙鐨勯伕鐢細
闆婚樆娓│鍎�锛屾槸娓噺鐗╅珨灏�(d菐o)闆绘�х殑涓�绋剙鍣紝闆婚樆娓│鍎�琚唬娉涚殑鎳�(y墨ng)鐢ㄤ簬闆绘埃瀹夊叏妾㈡煡鑸囨帴鍦板伐绋嬬宸ラ绛夊牬鍚堛�傞浕闃绘脯瑭﹀剙鐨勭ó椤炴瘮杓冨锛屽寘鎷帴鍦伴浕闃绘脯瑭﹀剙銆佺禃绶ｉ浕闃绘脯瑭﹀剙銆佹帴鍦伴浕闃绘脯瑭﹀剙銆佺洿娴侀浕闃绘脯閲忓剙銆佽〃闈㈤浕闃绘脯瑭﹀剙浠ュ強鍥炶矾闆婚樆娓│
浣跨敤鏂规硶锛�
鎺ュ湴闆婚樆娓│鍎�鏄寚鍩嬪叆鍦颁笅鐨勬帴鍦伴珨闆婚樆鍜屽湡澹ゆ暎娴侀浕闃伙紝閫氬父閲囩敤鍨嬫帴鍦伴浕闃绘脯閲忓剙(鎴栫ū鎺ュ湴闆婚樆鎼栬〃)閫茶娓噺銆傚瀷娓噺鍎�鍏跺褰㈣垏鏅�氱禃绶ｆ悥琛ㄥ樊涓嶅锛屼篃灏辨寜缈掓叄绋辩偤鎺ュ湴闆婚樆鎼栬〃銆傚瀷鎼栬〃鐨勫褰㈢祼(ji茅)妲�(g貌u)闅ㄥ瀷铏熺殑涓嶅悓绋嶆湁璁婂寲锛屼絾浣跨敤鏂规硶鍩烘湰鐩稿悓銆傚瀷鎺ュ湴闆婚樆娓噺鍎�闅ㄨ〃闄勫付鎺ュ湴鎺㈡脯妫掑叐鏀�佸皫(d菐o)绶氫笁鏍广�備娇鐢ㄦ柟娉曞拰娓噺姝ラ濡備笅:
(a)鎺ュ湴闆婚樆娓│鍎�(b)閫ｆ帴绶�(c)娓噺鎺ュ湴妫�
1銆佹媶闁嬫帴鍦板共绶氳垏鎺ュ湴楂旂殑閫ｆ帴榛烇紝鎴栨媶闁嬫帴鍦板共绶氫笂鎵�鏈夋帴鍦版敮绶氱殑閫ｆ帴榛炪��
2銆佸皣鍏╂牴鎺ュ湴妫掑垎鍒ユ彃鍏ュ湴闈�400mm娣憋紝涓�鏍归洟鎺ュ湴楂�40m閬狅紝鍙︿竴鏍归洟鎺ュ湴楂�20m閬犮��
3銆佹妸鎼栬〃缃簬鎺ュ湴楂旇繎鏃佸钩鏁寸殑鍦版柟锛岀劧鍚庨�茶鎺ョ窔銆�
(1)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丒鍜屾帴鍦拌缃殑鎺ュ湴楂擡鈥层��
(2)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丆鍜岄洟鎺ュ湴楂�40m閬犵殑鐨勬帴鍦版C鈥层��
(3)鐢ㄤ竴鏍归�ｆ帴绶氶�ｆ帴琛ㄤ笂鎺ョ窔妯丳鍜岄洟鎺ュ湴楂�20m閬犵殑鎺ュ湴妫扨鈥层��
4銆佹牴鎿�(j霉)琚脯鎺ュ湴楂旂殑鎺ュ湴闆婚樆瑕佹眰锛岃(di脿o)绡�(ji茅)濂界矖瑾�(di脿o)鏃嬮垥(涓婃湁涓夋獢鍙(di脿o)鑼冨湇)銆�
5銆佷互绱�120杞�(zhu菐n)/鍒嗛悩鐨勯�熷害鍧囧嫽鍦版悥鍕曟悥琛ㄣ�傜暥琛ㄩ嚌鍋忚綁(zhu菐n)鏅傦紝闅ㄥ嵆瑾�(di脿o)绡�(ji茅)寰(di脿o)鎾ョ洡锛岀洿鑷宠〃閲濆眳涓偤姝��備互寰(di脿o)鎾ョ洡瑾�(di脿o)瀹氬悗鐨勮畝鏁�(sh霉)锛屽幓涔樹互绮楄(di脿o)瀹氫綅鍊嶆暩(sh霉)锛屽嵆鏄娓帴鍦伴珨鐨勬帴鍦伴浕闃汇�備緥濡傚井瑾�(di脿o)璁�鏁�(sh霉)鐐�0.6锛岀矖瑾�(di脿o)鐨勯浕闃诲畾浣嶅�嶆暩(sh霉)鏄�10锛屽墖琚脯鐨勬帴鍦伴浕闃绘槸6惟銆�
6銆佺偤浜嗕繚璀夋墍娓帴鍦伴浕闃诲�肩殑鍙潬锛屾噳(y墨ng)鏀硅畩鏂逛綅閲嶆柊閫茶寰�(f霉)娓�傚彇骞炬娓緱鍊肩殑骞冲潎鍊间綔鐐烘帴鍦伴珨鐨勬帴鍦伴浕闃汇��
琛ㄩ潰浠嬬垂
琛ㄩ潰闆婚樆娓│鍎�娓噺闃绘姉婧害鍜屾繒搴︺��"婵曞害鍜屾韩搴︽渻褰遍熆闃绘姉锛屾墍浠ュ繀闋堟脯閲�" 娓噺琛ㄩ潰闃绘姉10 -10 姝愬/鈻★紝娓噺闆婚樆10 -10 姝愬
鎿嶄綔鎵嬪唺
娓噺鍓嶏紝棣栧厛纰轰繚寰呮脯琛ㄩ潰骞插噲鐒℃薄鏌�
琛ㄩ潰闃绘姉
1 銆佸钩琛屾帰闋樆鎶楁脯閲忔硶(Parallel Probe ResistivityMethod)
骞宠鎺㈤牠闃绘姉娓噺娉曟槸绗﹀悎EOS/ESD-S11.11-1993妯欐簴鐨勬脯閲忔柟娉曪紝閫欐槸涓�绋揩閫熺殑娓噺骞抽潰鍧囧嫽鏉愭枡闆婚樆鍊肩殑鏂规硶銆傞�欑ó鏂规硶涔熼仼鍚堜簬澶氬堡鏉愭枡鐨勬脯閲忥紝浣嗘槸鍦ㄩ樆鎶楀�煎牨鍛婁腑蹇呴爤娉ㄦ槑娓噺鏅傜殑婧害鍜屾繒搴︽浠躲�� A 銆佸皣琛ㄦ斁鍦ㄥ緟娓噺鐨勭墿楂旇〃闈���
B銆佸皣闁嬮棞(gu膩n)瑾�(di脿o)鍒版墍闇�鐨勯浕澹撲綅缃�(10浼忔垨100浼�)
C銆佷互澶х磩5纾呯殑澹撳姏鎸佺簩(x霉)鎸変笅娓噺鎸夐垥锛屾鏅侺CD灞忔渻椤ず鍑烘脯閲忕殑琛ㄩ潰闃绘姉锛屾韩搴﹀拰鐩稿皪婵曞害鍊硷紝鏁村�嬫脯閲忛亷绋嬪ぇ绱勭偤鍗佷簲绉掔ó銆�
路琛ㄩ潰闃绘姉鍠綅鐐烘瓙濮�/鈻�
路婧害鍠綅鐐烘敐寮�
路鐩稿皪婵曞害鍠綅鐐虹櫨鍒嗘瘮
鍦ㄦ瘡娆℃脯閲忎腑锛屾寜涓嬫脯閲忔寜閳曞悗锛屾脯瑭﹀剙灏囬�ｇ簩(x霉)椤ず淇暣娓噺鍊硷紝鏉鹃枊鎸夐垥鍚庣磩鍥涘崄浜旂鍏�(n猫i)锛岄’绀虹殑鏄渶鍚庝竴鍊嬫脯閲忓�笺��
2 銆佸悓蹇冪挵(hu谩n)鎺㈤牠闃绘姉娓噺娉�(Concentric Ring Probe Resistivitymethod)(鍚屽績鐠�(hu谩n)鎺㈤牠鐐洪伕璩间欢)
灏囬�ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁�� 3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍚屽績鐠�(hu谩n)鎺㈤牠 (閬歌臣浠�)鐩歌伅(li谩n)銆傚皣鎺㈤牠鏀惧湪寰呮脯瑭︾墿楂旇〃闈㈠悗锛屾寜涓嬫寜閳曠磩15绉掗悩鍚庯紝鍦ㄦ恫鏅堕’绀哄睆涓婂皣椤ず鍑烘纰虹殑婧害鍜岀浉灏嶆繒搴︼紝姝ｇ⒑鐨勮〃闈㈤樆鎶楀�肩偤娑叉櫠椤ず灞忎笂鐨勮畝鏁�(sh霉)涔樹互 10锛屽柈浣嶇偤姝愬/鈻°�� 渚嬪:
鏅跺睆涓婇’绀虹偤3.5脳10 4 姝愬/鈻�;瀵﹂殯闃绘姉鍊肩偤3.5脳10 5 姝愬/鈻°��
浜屻�佽〃闈㈤浕闃绘脯閲�(榛炲皪榛�) (Surface ResistanceMeasurement (RTT))
閫欏�嬫脯閲忔柟娉曟槸绗﹀悎EOS/ESD-S4.1娓噺瑕佹眰渚嗘脯閲忕崹绔嬩簬鎺ュ湴鐨勫叐榛炰箣闁撶殑闆婚樆锛岀敤閫欏�嬫脯閲忔柟娉曞緱鍑虹殑娓噺绲�(ji茅)鏋滆垏琚脯鐗╅珨鐨勮檿鐞嗐�佸叐鍊�5纾呮帰闋箣闁撶殑璺濋洟绛夊洜绱犳湁闂�(gu膩n)锛屽洜姝わ紝鎳�(y墨ng)閬告搰姝ｇ⒑鐨勬脯閲忚(gu墨)绋嬶紝姣忔鍦ㄥ悓妯ｈ姹傜殑娓噺姊濅欢涓嬮�茶娓│銆� A 銆佸皣閫ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁��3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍏╁��5纾呴噸鎺㈤牠鐩歌伅(li谩n)銆�
B銆佹寜鐓ф脯閲忚(gu墨)绋嬪皣鍏╁�嬫帰闋斁缃湪寰呮脯鐗╅珨琛ㄩ潰銆�
C銆侀伕鎿囨墍闇�鐨勯浕澹撳��(10浼忔垨100浼�)
D銆佹寜涓嬮枊闂�(gu膩n)鐩村埌椤ず鍑烘墍閬哥殑闆诲鍊�(10浼忔垨100浼�)锛岀辜绾�(x霉)鎸夎憲闁嬮棞(gu膩n)鐩磋嚦鎵�娓浕闃�(鍠綅鐐烘瓙 濮�)锛岀浉灏嶆繒搴﹀拰婧害椤ず鍦ㄦ恫鏅堕’绀哄睆涓娿��
闆婚樆娓噺
閫欏�嬫脯閲忔柟娉曟槸鐢ㄤ簬娓噺鐗╅珨琛ㄩ潰涓�榛炶垏琛ㄩ潰涓婂彟涓�鎺ュ湴榛炰箣闁撶殑琛ㄩ潰闆婚樆锛屾脯閲忔柟娉曠鍚圗OS/ESD S4.1娓噺妯欐簴銆�
A 銆佸皣鍏╂閫ｇ窔鐨勪竴绔垎鍒ユ彃鍏ヨ〃鐨勫叐鍊�3.5姣背鎻掑瓟锛岀劧鍚庡皣鍏朵腑涓�姊濇帴楸烽瓪澶撅紝鍙﹀涓�姊濊垏涓�鍊�5纾呴噸鐩ゅ舰鎺㈤牠鐩歌伅(li谩n)銆�
B銆佸皣楸烽瓪澶惧瓙鎺ュ埌鎵�鐭ョ殑鎺ュ湴榛炰笂锛屾寜鐓ф脯閲忚姹傚皣鐩ゅ舰鎺㈤牠鏀惧湪寰呮脯鐗╅珨琛ㄩ潰涓娿��
C銆佹寜涓嬫脯閲忔寜閳曠洿鑷抽浕闃�(鍠綅鐐烘瓙濮�)銆佺浉灏嶆繒搴︺�佹韩搴﹀�奸’绀哄湪椤ず灞忎笂锛屾脯閲忕祼(ji茅)鏋滅鍚圗IA锛孍OS/ESD锛孉NSI锛� IEC-93,CECC,ASTM娓噺妯欐簴锛屽皪浜庨珮闃绘姉鏉愭枡鐨勬脯閲忔檪鐐轰繚璀夋脯寰楅珮绮惧害娓噺绲�(ji茅)鏋滐紝闇�娉ㄦ剰涓嶈浣垮叐寮曠窔浜ょ枈锛屼笉瑕佺敤鎵嬫帴瑙告帰闋紝寮曠窔鍜岃娓墿楂斻��
鏍℃簴姝ラ锛�
1 銆佽寖鍦嶇偤10 3 鍒�10 12 鍏锋湁绮惧害1%鐨勯樆鎶楅浕姗嬨�傞珮绮惧害鐩稿皪婵曞害琛�(Relative Humidity Hygrometer)楂樼簿搴︽韩搴﹁〃(High accuracy Thermometer)
2銆佹墦闁嬭〃钃嬶紝灏忓績鍒囪帿鎼嶅偡闆昏矾鏉夸笂鍏╂閫ｆ帴闆绘簮闁嬮棞(gu膩n)鐨勫皫(d菐o)绶氥��
3銆佹壘鍒伴浕璺澘鍙充笅鏂逛笁鍊嬫牎姝ｈ(di脿o)绡�(ji茅)鍣�(Calibration Pots)
4銆佷娇琛ㄥ湪閫欎竴鐠�(hu谩n)澧冩浠朵笅璧风⒓1/2灏忔檪锛屽彇寰楄嚜骞宠 鍚庢墠鍙枊濮嬫脯瑭︺��
5銆侀噰鐢ㄦ脯瑭﹀剙鑷付鐨勯�ｆ帴绶氫竴绔�ｆ帴涓婇狈榄氬ぞ锛屽彟涓�绔钑夋彃闋��
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